Titanium-silicon Sputtering Targets

If we combine titanium and silicon together, they are becoming wear resistant even when the temperatures are high. This is because the former ensures remarkably tough coatings and the latter guarantees high resistance to oxidation.

 
If the coating material is purer, the quality of the hard material layer will be better. We supply titanium-silicon targets with guaranteed purity because we produce our titanium-silicon products from the metal powder to the finished product ourselves. Furthermore, our targets achieve an excellent density and extend the service life by applying the powder metallurgical production process.
 
We can supply tubular, rectangular titanium-silicon targets and customized titanium-silicon targets.
 
Your perfect coating with our excellent microstructure.

Titanium Silicon

TiSi 80/20at%

Composition valuespec.unit
Si12..34±1wt%
Tibalancewt%
Fe≤800ppm
C≤400ppm
N≤3000ppm
O≤3500ppm
H≤300ppm

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